Materials and Processes for Next Generation Lithography.
by
 
Robinson, Alex, editor.

Title
: 
Materials and Processes for Next Generation Lithography.

Author
: 
Robinson, Alex, editor.

ISBN
: 
9780081003589

Publication Information
: 
Amsterdam, Netherlands : Elsevier, 2016.

Physical Description
: 
1 online resource

Series
: 
Frontiers of nanoscience, v. 11
 
Frontiers of nanoscience ; v. 11.

Subject Term
: 
Microlithography.
 
Photoresists.

Added Author
: 
Robinson, Alex,
 
Lawson, Richard,

Electronic Access
: 
ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book459226-1001ONLINEElektronik Kütüphane