Handbook of silicon wafer cleaning technology
by
 
Reinhardt, Karen A., editor.

Title
: 
Handbook of silicon wafer cleaning technology

Author
: 
Reinhardt, Karen A., editor.

ISBN
: 
9780323510851
 
9780323510844

Edition
: 
Third edition.

Physical Description
: 
1 online resource

Series
: 
Materials science & process technology series
 
Materials science and process technology series.

Subject Term
: 
Silicon-on-insulator technology.

Added Author
: 
Reinhardt, Karen A.,
 
Kern, Werner, 1925-

Electronic Access
: 
ScienceDirect https://www.sciencedirect.com/science/book/9780323510844


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book460022-1001ONLINEElektronik Kütüphane