Poly-SiGe for MEMS-above-CMOS Sensors
by
 
Gonzalez Ruiz, Pilar. author.

Title
: 
Poly-SiGe for MEMS-above-CMOS Sensors

Author
: 
Gonzalez Ruiz, Pilar. author.

ISBN
: 
9789400767997

Edition
: 
1st ed. 2014.

Physical Description
: 
XVI, 199 p. online resource.

Series
: 
Springer Series in Advanced Microelectronics, 44

Subject Term
: 
Electronic circuits.
 
Optical materials.
 
Electronic materials.
 
Materials science.

Added Author
: 
De Meyer, Kristin.
 
Witvrouw, Ann.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
https://doi.org/10.1007/978-94-007-6799-7


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book488174-1001ONLINEElektronik Kütüphane