Poly-SiGe for MEMS-above-CMOS Sensors
by
Gonzalez Ruiz, Pilar. author.
Title
:
Poly-SiGe for MEMS-above-CMOS Sensors
Author
:
Gonzalez Ruiz, Pilar. author.
ISBN
:
9789400767997
Edition
:
1st ed. 2014.
Physical Description
:
XVI, 199 p. online resource.
Series
:
Springer Series in Advanced Microelectronics, 44
Subject Term
:
Electronic circuits.
Optical materials.
Electronic materials.
Materials science.
Added Author
:
De Meyer, Kristin.
Witvrouw, Ann.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 488174-1001 | ONLINE | | Elektronik Kütüphane |