Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
by
Hilleringmann, Ulrich. author.
Title
:
Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
Author
:
Hilleringmann, Ulrich. author.
ISBN
:
9783658410414
Edition
:
1st ed. 2023.
Physical Description
:
XI, 264 p. 178 illus., 2 illus. in color. online resource.
Contents
:
Wafer fabrication -- Thermal oxidation -- Lithography -- Etching technology -- Doping techniques -- Chemical and Physical Deposition -- Metallization and Contacts.
Subject Term
:
Electronics.
Electronic circuits.
Semiconductors.
Electronics and Microelectronics, Instrumentation.
Electronic Circuits and Systems.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 527665-1001 | ONLINE | | Elektronik Kütüphane |