Micro and Nano Fabrication Tools and Processes
by
Gatzen, Hans H. author.
Title
:
Micro and Nano Fabrication Tools and Processes
Author
:
Gatzen, Hans H. author.
ISBN
:
9783662443958
Edition
:
1st ed. 2015.
Physical Description
:
XXVI, 519 p. 357 illus., 54 illus. in color. online resource.
Contents
:
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
Subject Term
:
Microtechnology.
Microelectromechanical systems.
Manufactures.
Microsystems and MEMS.
Machines, Tools, Processes.
Added Author
:
Saile, Volker.
Leuthold, Jürg.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 530075-1001 | ONLINE | | Elektronik Kütüphane |