Introduction to Microsystem Design
by
 
Schomburg, Werner Karl. author.

Title
: 
Introduction to Microsystem Design

Author
: 
Schomburg, Werner Karl. author.

ISBN
: 
9783662470237

Edition
: 
2nd ed. 2015.

Physical Description
: 
XXIV, 374 p. 380 illus., 332 illus. in color. online resource.

Series
: 
RWTHedition,

Contents
: 
Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.

Subject Term
: 
Electronics.
 
Electronic circuits.
 
Microtechnology.
 
Microelectromechanical systems.
 
Electronics and Microelectronics, Instrumentation.
 
Electronic Circuits and Systems.
 
Microsystems and MEMS.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
https://doi.org/10.1007/978-3-662-47023-7


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book530076-1001ONLINEElektronik Kütüphane