Novel Optical Technologies for Nanofabrication
by
Liu, Qian. author.
Title
:
Novel Optical Technologies for Nanofabrication
Author
:
Liu, Qian. author.
ISBN
:
9783642403873
Edition
:
1st ed. 2014.
Physical Description
:
IX, 267 p. 232 illus., 162 illus. in color. online resource.
Series
:
Nanostructure Science and Technology,
Contents
:
Introduction -- Super-resolution Laser Direct Writing and Its Applications -- Laser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices.
Subject Term
:
Nanotechnology.
Microtechnology.
Microelectromechanical systems.
Lasers.
Optical materials.
Nanoscience.
Microsystems and MEMS.
Laser.
Nanophysics.
Added Author
:
Duan, Xuanming.
Peng, Changsi.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 530819-1001 | ONLINE | | Elektronik Kütüphane |