Atomic Layer Deposition for Semiconductors
by
Hwang, Cheol Seong. editor.
Title
:
Atomic Layer Deposition for Semiconductors
Author
:
Hwang, Cheol Seong. editor.
ISBN
:
9781461480549
Edition
:
1st ed. 2014.
Physical Description
:
X, 263 p. 170 illus., 81 illus. in color. online resource.
Contents
:
Introduction -- Precursors and reaction mechanisms -- ALD simulations -- ALD for mass-production memories (DRAM and Flash) -- ALD for emerging memories -- PcRAM -- FeRAM -- Front end of the line process -- Back end of the line -- ALD machines.
Subject Term
:
Electrochemistry.
Semiconductors.
Computer storage devices.
Memory management (Computer science).
Electric power production.
Electronics.
Computer Memory Structure.
Electrical Power Engineering.
Mechanical Power Engineering.
Electronics and Microelectronics, Instrumentation.
Added Author
:
Hwang, Cheol Seong.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 530831-1001 | ONLINE | | Elektronik Kütüphane |