Copper Electrodeposition for Nanofabrication of Electronics Devices
by
 
Kondo, Kazuo. editor.

Title
Copper Electrodeposition for Nanofabrication of Electronics Devices

Author
Kondo, Kazuo. editor.

ISBN
9781461491767

Edition
1st ed. 2014.

Physical Description
VIII, 282 p. 190 illus., 75 illus. in color. online resource.

Series
Nanostructure Science and Technology, 171

Contents
Copper Electrodeposition -- Suppression Effect and Additive Chemistry -- Acceleration Effect -- Modeling and Simulation -- Frontiers of Cu Electrodeposition and Electroless Plating for On-Chip Interconnects -- Microstructure of Evolution of Copper in Nano-scale Interconnect Features -- Direct Copper Plating -- Through Silicon Via -- Build-up Printed Wiring Boards -- Copper Foil Smooth on Both Sides for Lithium Ion Battery -- Through Hole Plating.

Subject Term
Electrochemistry.
 
Nanotechnology.
 
Electronics.
 
Condensed matter.
 
Electronics and Microelectronics, Instrumentation.
 
Condensed Matter Physics.

Added Author
Kondo, Kazuo.
 
Akolkar, Rohan N.
 
Barkey, Dale P.
 
Yokoi, Masayuki.

Added Corporate Author
SpringerLink (Online service)

Electronic Access
https://doi.org/10.1007/978-1-4614-9176-7


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book530918-1001ONLINEElektronik Kütüphane