Copper Electrodeposition for Nanofabrication of Electronics Devices
by
Kondo, Kazuo. editor.
Title
:
Copper Electrodeposition for Nanofabrication of Electronics Devices
Author
:
Kondo, Kazuo. editor.
ISBN
:
9781461491767
Edition
:
1st ed. 2014.
Physical Description
:
VIII, 282 p. 190 illus., 75 illus. in color. online resource.
Series
:
Nanostructure Science and Technology, 171
Contents
:
Copper Electrodeposition -- Suppression Effect and Additive Chemistry -- Acceleration Effect -- Modeling and Simulation -- Frontiers of Cu Electrodeposition and Electroless Plating for On-Chip Interconnects -- Microstructure of Evolution of Copper in Nano-scale Interconnect Features -- Direct Copper Plating -- Through Silicon Via -- Build-up Printed Wiring Boards -- Copper Foil Smooth on Both Sides for Lithium Ion Battery -- Through Hole Plating.
Subject Term
:
Electrochemistry.
Nanotechnology.
Electronics.
Condensed matter.
Electronics and Microelectronics, Instrumentation.
Condensed Matter Physics.
Added Author
:
Kondo, Kazuo.
Akolkar, Rohan N.
Barkey, Dale P.
Yokoi, Masayuki.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 530918-1001 | ONLINE | | Elektronik Kütüphane |