MEMS : introduction and fundamentals
by
Gad-el-Hak, Mohamed, 1945-
Title
:
MEMS : introduction and fundamentals
Author
:
Gad-el-Hak, Mohamed, 1945-
ISBN
:
9780429125454
Edition
:
Second edition.
Physical Description
:
1 online resource (488 pages)
Series
:
Mechanical engineering series
The MEMS handbook
Mechanical engineering series (Boca Raton, Fla.)
General Note
:
One of three parts whose previous edition was a published as a single volume.
Contents
:
chapter 1 Introduction -- chapter 2 Scaling of Micromechanical Devices -- chapter 3 Mechanical Properties of MEMS Materials -- chapter 4 Flow Physics -- chapter 5 Integrated Simulation for MEMS -- chapter 6 Molecular-Based Microfluidic Simulation Models -- chapter 7 Hydrodynamics of Small-Scale Internal Gaseous Flows -- chapter 8 Burnett Simulations of Flows in Microdevices -- chapter 9 Lattice Boltzmann Simulations of Slip Flow in Microchannels -- chapter 10 Liquid Flows in Microchannels -- chapter 11 Lubrication in MEMS -- chapter 12 Physics of Thin Liquid Films -- chapter 13 Bubble/Drop Transport in Microchannels -- chapter 14 Fundamentals of Control Theory -- chapter 15 Model-Based Flow Control for Distributed Architectures -- chapter 16 Soft Computing in Control.
Subject Term
:
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
Added Author
:
Gad-el-Hak, Mohamed, 1945-
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 538899-1001 | TK7875 .M43 2006 | | CRC E-Books |