chapter 1 VLSI Technology: A System Perspective -- chapter 2 CMOS/BiCMOS Technology -- chapter 3 Bipolar Technology -- chapter 4 Silicon on Insulator Technology -- chapter 5 SiGe Technology -- chapter 6 SiC Technology -- chapter 7 Passive Components -- chapter 8 Power IC Technologies -- chapter 9 Noise in VLSI Technologies -- chapter 10 Micromachining -- chapter 11 Microelectronics Packaging -- chapter 12 Multichip Module Technologies -- chapter 13 Channel Hot Electron Degradation-Delay in MOS Transistors Due to Deuterium Anneal -- chapter 14 Materials -- chapter 15 Compound Semiconductor Devices for Digital Circuits -- chapter 16 Logic Design Principles and Examples -- chapter 17 Logic Design Examples.