Nano-CMOS gate dielectric engineering
by
Wong, Hei., author.
Title
:
Nano-CMOS gate dielectric engineering
Author
:
Wong, Hei., author.
ISBN
:
9781439849606
Physical Description
:
1 online resource (xiv, 234 pages)
Contents
:
1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
Subject Term
:
Dielectrics.
Metal oxide semiconductors, Complementary -- Design and construction.
Nanoelectronics -- Materials.
Gate array circuits.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 541476-1001 | TK7871.99 .M44 W66 2012 | | CRC E-Books |