Nanofabrication handbook
by
 
Cabrini, Stefano.

Title
: 
Nanofabrication handbook

Author
: 
Cabrini, Stefano.

ISBN
: 
9780429193293

Physical Description
: 
1 online resource (xv, 518 pages)

Contents
: 
pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.

Subject Term
: 
Nanostructured materials -- Handbooks, manuals, etc.
 
Nanostructures -- Handbooks, manuals, etc.

Added Author
: 
Cabrini, Stefano.
 
Kawata, Satoshi, 1966-

Electronic Access
: 
Click here to view.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book543217-1001TA418.9 .N35 N2523 2012CRC E-Books