Microengineering, MEMS, and interfacing : a practical guide
by
 
Banks, Danny., author.

Title
: 
Microengineering, MEMS, and interfacing : a practical guide

Author
: 
Banks, Danny., author.

ISBN
: 
9780429118883

Physical Description
: 
1 online resource

Series
: 
Mechanical engineering ; 199

Contents
: 
chapter 1 Photolithography -- chapter 2 Silicon Micromachining -- chapter 3 Nonsilicon Processes -- chapter 4 Mask Design -- chapter 5 Microsensors -- chapter 6 Microactuators -- chapter 7 Micro Total Analysis Systems -- chapter 8 Integrated Optics -- chapter 9 Assembly and Packaging -- chapter 10 Nanotechnology -- part Part III -- chapter 11 Amplifiers and Filtering -- chapter 12 Computer Interfacing.

Subject Term
: 
Microelectromechanical systems.

Electronic Access
: 
Click here to view.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book544843-1001TK7875 .B36 2006CRC E-Books