Handbook of semiconductor interconnection technology
by
 
Schwartz, G. C.

Title
: 
Handbook of semiconductor interconnection technology

Author
: 
Schwartz, G. C.

ISBN
: 
9781420017656

Edition
: 
Second edition.

Physical Description
: 
1 online resource (520 pages)

Contents
: 
chapter 1 Methods/Principles of Deposition and Etching of Thin Films -- chapter 2 Characterization / chapter 3 Semiconductor Contact Technology / chapter 4 Interlevel Dielectrics / chapter 5 Metallization / chapter 6 Chip Integration / chapter 7 Reliability

Subject Term
: 
Semiconductors -- Design and construction.
 
Interconnects (Integrated circuit technology)
 
Semiconductors -- Junctions.

Added Author
: 
Schwartz, G. C.
 
Srikrishnan, K. V., 1948-

Electronic Access
: 
Click here to view.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book545976-1001TK7874.53 .H36 2006CRC E-Books