Semiconductor industry : wafer fab exhaust management
by
Sherer, J. Michael, 1958- author.
Title
:
Semiconductor industry : wafer fab exhaust management
Author
:
Sherer, J. Michael, 1958- author.
ISBN
:
9781315221052
9781351828253
Physical Description
:
1 online resource (194 pages)
Contents
:
chapter 1 Semiconductor and Wafer Manufacturing Facilities -- chapter 2 Exhaust Types and Challenges -- chapter 3 Point-Of-Use Devices and Exhaust- Line Requirements -- chapter 4 Centralized Scrubbers -- chapter 5 Centralized Equipment to Control Volatile Organic Compounds -- chapter 6 Emergency Releases -- chapter 7 Exhaust Management and Air Abatement Equipment Examples.
Subject Term
:
Air -- Purification -- Technological innovations.
Semiconductor industry -- Environmental aspects.
Semiconductor wafers -- Design and construction.
Volatile organic compounds -- Environmental aspects.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 546494-1001 | TK7871.85 .S5224 2005 | | CRC E-Books |