Photonic MEMS devices : design, fabrication and control
by
 
Liu, Ai-Qun, author.

Title
Photonic MEMS devices : design, fabrication and control

Author
Liu, Ai-Qun, author.

ISBN
9781420045710
 
9781315219875
 
9781351827072

Physical Description
1 online resource (483 pages).

Series
Optical science and engineering series ; Volume 136
 
Optical science and engineering (Boca Raton, Fla.)

Contents
chapter 1 MEMS Optical Switches and Systems / chapter 2 Design of MEMS Optical Switches / chapter 3 MEMS Thermo-Optic Switches / chapter 4 PhC Microresonators Dynamic Modulation Devices / chapter 5 MEMS Variable Optical Attenuators / chapter 6 MEMS Discretely Tunable Lasers / chapter 7 MEMS Continuously Tunable Lasers / chapter 8 MEMS Injection-Locked Lasers / chapter 9 Deep Etching Fabrication Process / chapter 10 Deep Submicron Photonic Bandgap Crystal Fabrication Processes / chapter 11 Control Strategies for Electrostatic MEMS Devices / chapter 12 Control of Optical Devices

Subject Term
Microelectromechanical systems.
 
Photonics.

Electronic Access
Click here to view.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book547879-1001TK7875 .L58 2009CRC E-Books