Scanning probe lithography : fundamentals, materials, and applications
by
 
Ryu, Yu Kyoung, author.

Title
: 
Scanning probe lithography : fundamentals, materials, and applications

Author
: 
Ryu, Yu Kyoung, author.

ISBN
: 
9781003223610
 
9781000804867
 
9781000804911

Physical Description
: 
1 online resource (1 volume) : illustrations

Series
: 
Emerging materials and technologies

Subject Term
: 
Microlithography -- Industrial applications.
 
Scanning probe microscopy -- Industrial applications.
 
TECHNOLOGY / Nanotechnology
 
TECHNOLOGY / Electronics / Microelectronics
 
TECHNOLOGY / Engineering / Chemical & Biochemical

Added Author
: 
Martínez Rodrigo, Javier,

Electronic Access
: 
Taylor & Francis https://www.taylorfrancis.com/books/9781003223610
 
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book575173-1001TK7888.4Taylor Fransic E-Kitap Koleksiyonu