Microlithography : science and technology
by
 
Smith, Bruce W., 1959- editor.

Title
: 
Microlithography : science and technology

Author
: 
Smith, Bruce W., 1959- editor.

ISBN
: 
9781315117171
 
9781439876763
 
9781351633949
 
9781351643443

Edition
: 
Third edition.

Physical Description
: 
1 online resource.

Subject Term
: 
Microlithography -- Industrial applications.
 
Integrated circuits -- Masks.
 
Metal oxide semiconductors, Complementary -- Design and construction.
 
Manufacturing processes.
 
TECHNOLOGY / Lasers
 
TECHNOLOGY / Electronics / Microelectronics

Added Author
: 
Smith, Bruce W., 1959-
 
Suzuki, Kazuaki,

Electronic Access
: 
Taylor & Francis https://www.taylorfrancis.com/books/9781315117171
 
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book577634-1001TK7836Taylor Fransic E-Kitap Koleksiyonu