Handbook of VLSI microlithgraphy : principles, technology and applications
Title
: 
Handbook of VLSI microlithgraphy : principles, technology and applications

ISBN
: 
9780815512813

Edition
: 
Reprint ed.

Publication Information
: 
Park Ridge, N. J. : Noyes, 1991.

Physical Description
: 
xii, 649 s.

Subject Term
: 
İNTEGRE DEVRELER -- ÇOK GENİŞ KAPSAMLI.
 
MİKROLİTOGRAFİ.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Beytepe LibraryBook7.2/12/594162TK 7874 H3494 1991Beytepe Genel Koleksiyon