Measurement technology for micro-nanometer devices
by
Zhang, Wendong, author.
Title
:
Measurement technology for micro-nanometer devices
Author
:
Zhang, Wendong, author.
ISBN
:
9781118717998
9781118717981
9781118717974
Physical Description
:
1 online resource
Contents
:
Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.
Abstract
:
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices.
Local Note
:
John Wiley and Sons
Subject Term
:
Microtechnology -- Measurement.
Nanotechnology -- Measurement.
Microelectromechanical systems -- Testing.
Physical measurements.
Mesures physiques.
TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades.
Physical measurements
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 593078-1001 | TA418.9 .N35 | | Wiley E-Kitap Koleksiyonu |