Fine line lithography
by
 
Newman, Roger.

Title
: 
Fine line lithography

Author
: 
Newman, Roger.

ISBN
: 
9780444853516
 
9780444601285
 
9781299537200

Publication Information
: 
Amsterdam ; New York : North-Holland Pub. Co. ; New York : Sole distributor for the USA and Canada, Elsevier North-Holland, 1980.

Physical Description
: 
1 online resource (vii, 481 pages).

Series
: 
Materials processing, theory and practices ; v. 1

Series Title
: 
Materials processing, theory and practices ; v. 1

Subject Term
: 
Integrated circuits -- Large scale integration.
 
Lithography.
 
Integrierte Schaltung.
 
Photolithographie (Halbleitertechnologie)

Genre
: 
Electronic books.

Added Author
: 
Newman, Roger.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780444853516


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book256117-1001ONLINEElektronik Kütüphane