Optical diagnostics for thin film processing
by
 
Herman, Irving P.

Title
: 
Optical diagnostics for thin film processing

Author
: 
Herman, Irving P.

ISBN
: 
9780123420701
 
9780080538082
 
9781281033024

Publication Information
: 
San Diego, CA : Academic Press, c1996.

Physical Description
: 
1 online resource (xxix, 783 p.) : ill.

Subject Term
: 
Thin films -- Surfaces.
 
Spectrum analysis -- Industrial applications.

Genre
: 
Electronic books.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780123420701


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book256319-1001ONLINEElektronik Kütüphane