Micromechanics and MEMS classic and seminal papers to 1990
by
 
Trimmer, W.

Title
: 
Micromechanics and MEMS classic and seminal papers to 1990

Author
: 
Trimmer, W.

ISBN
: 
9780470545263

Publication Information
: 
New York : IEEE Press, 1997.

Physical Description
: 
1 online resource (xv, 701 p.) : ill.

Subject Term
: 
Microelectronics.
 
Microelectromechanical systems.
 
Actuators.
 
Capteurs (technologie)
 
Micromécanique.
 
Dispositifs électromécaniques.

Genre
: 
Electronic books.

Added Author
: 
Trimmer, W.

Added Corporate Author
: 
Institute of Electrical and Electronics Engineers.

Electronic Access
: 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book249592-1001ONLINEElektronik Kütüphane