Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications
by
 
Seshan, Krishna.

Title
: 
Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications

Author
: 
Seshan, Krishna.

ISBN
: 
9781591241935
 
9780815517788
 
9780815514428
 
9780815517764

Edition
: 
2nd ed.

Publication Information
: 
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.

Physical Description
: 
1 online resource (xxviii, 629 p.) : ill.

Series
: 
Materials science and process technology series. Electronic materials and process technology

Series Title
: 
Materials science and process technology series. Electronic materials and process technology

Subject Term
: 
Thin film devices -- Design and construction -- Handbooks, manuals, etc.
 
Thin films -- Handbooks, manuals, etc.
 
Chemical vapor deposition -- Handbooks, manuals, etc.

Genre
: 
Electronic books.

Added Author
: 
Seshan, Krishna.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780815514428


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book251775-1001ONLINEElektronik Kütüphane