Principles of plasma discharges and materials processing
by
 
Lieberman, M. A. (Michael A.)

Title
: 
Principles of plasma discharges and materials processing

Author
: 
Lieberman, M. A. (Michael A.)

ISBN
: 
9780471724247
 
9780471720010
 
9780471724254

Edition
: 
2nd ed.

Publication Information
: 
Hoboken, N.J. : Wiley-Interscience, c2005.

Physical Description
: 
1 online resource (xxxv, 757 p.) : ill.

Subject Term
: 
Plasma dynamics.
 
Thin films -- Surfaces.
 
Plasma etching.
 
Plasma chemistry -- Industrial applications.

Genre
: 
Electronic books.

Added Author
: 
Lichtenberg, Allan J.

Electronic Access
: 
Full text available from Wiley InterScience
 
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
 
John Wiley http://dx.doi.org/10.1002/0471724254
 
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
 
http://swb.eblib.com/patron/FullRecord.aspx?p=227410


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book301733-1001ONLINEElektronik Kütüphane