Computational lithography
by
Ma, Xu, 1983-
Title
:
Computational lithography
Author
:
Ma, Xu, 1983-
ISBN
:
9780470618943
9780470618936
9780470596975
9781118043578
Publication Information
:
Hoboken, N.J. : Wiley, c2010.
Physical Description
:
1 online resource (xv, 226 p.) : ill.
Series
:
Wiley series in pure and applied optics
Series Title
:
Wiley series in pure and applied optics
Subject Term
:
Microlithography -- Mathematics.
Integrated circuits -- Design and construction -- Mathematics.
Photolithography -- Mathematics.
Semiconductors -- Etching -- Mathematics.
Resolution (Optics)
Genre
:
Electronic books.
Added Author
:
Arce, Gonzalo R.
Added Corporate Author
:
Wiley InterScience (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 298011-1001 | ONLINE | | Elektronik Kütüphane |