Fundamentals of semiconductor manufacturing and process control
by
 
May, Gary S.

Title
Fundamentals of semiconductor manufacturing and process control

Author
May, Gary S.

ISBN
9780471784067
 
9780471790273
 
9780471790280
 
9781615838455

Publication Information
[Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, ©2006.

Physical Description
1 online resource (xix, 463 pages) : illustrations

Subject Term
Semiconductors -- Design and construction.
 
Integrated circuits -- Design and construction.
 
Process control -- Statistical methods.
 
TECHNOLOGY & ENGINEERING -- Electronics -- Solid State.
 
TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors.

Genre
Electronic books.

Added Author
Spanos, Costas J.

Electronic Access
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book249425-1001ONLINEElektronik Kütüphane