Handbook of VLSI microlithography principles, technology, and applications
by
 
Helbert, John N.

Title
: 
Handbook of VLSI microlithography principles, technology, and applications

Author
: 
Helbert, John N.

ISBN
: 
9781591242758
 
9780815514442
 
9780815517795

Edition
: 
2nd ed.

Publication Information
: 
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., c2001.

Physical Description
: 
1 online resource (xxi, 1001 p.) : ill.

Series
: 
Materials science and process technology series. Electronic materials and process technology

Series Title
: 
Materials science and process technology series. Electronic materials and process technology

Subject Term
: 
Integrated circuits -- Very large scale integration.
 
Microlithography.

Genre
: 
Electronic books.

Added Author
: 
Helbert, John N.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780815514442


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254148-1001ONLINEElektronik Kütüphane