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Cover image for Polymers in microlithography : materials and processes
Title:
Polymers in microlithography : materials and processes
Author:
Reichmanis, Elsa, 1953-, ed.
ISBN:
9780841217010
Publication Information:
Washington : American Chemical Society, 1989.
Physical Description:
xii, 449 s.
Series:
ACS symposium series ; 412.
Series Title:
ACS symposium series ; 412.
Subject Term:
Polimerler -- Kongreler.

Fotorezistler -- Kongreler.

Mikroelektronik -- Gereçler -- Kongreler.

Polymers -- Congresses.

Photoresists -- Congresses.

Microlithography -- Materials -- Congresses.
Added Author:
Reichmanis, Elsa, 1953-, ed.

MacDonald, Scott A., ed.

Iwayanagi, Takao, 1949-, ed.
Added Corporate Author:
American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Holds:
Copies:

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 Book 7.2/12/426333 TK7871.15.P6 P635 1989
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