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Cover image for Handbook of VLSI microlithography principles, technology, and applications
Handbook of VLSI microlithography principles, technology, and applications
Author 
Glendinning, William B. Helbert, John N.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815512813
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Online Library~1
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2. 
Cover image for Fine line lithography
Fine line lithography
Author 
Newman, Roger.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780444853516
Format: 
Availability 
Online Library~1
Available:
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