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Cover image for Semiconductor industry wafer fab exhaust management
Title:
Semiconductor industry wafer fab exhaust management
Author:
Sherer, J. Michael, 1958-
ISBN:
9781420027198
Publication Information:
Boca Raton : CRC/Taylor & Francis, 2005.
Physical Description:
194 p.
Subject Term:
Semiconductor wafers -- Design and construction.

Semiconductor industry -- Environmental aspects.

Volatile organic compounds -- Environmental aspects.

Air -- Purification -- Technological innovations.
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