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Cover image for Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS
Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS
Author 
Adachi, Hideaki. Wasa, Kiyotaka. Kanno, Isaku. Kotera, Hidetoshi.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9781437734836
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2. 
Cover image for Thin film materials technology sputtering of compound materials
Thin film materials technology sputtering of compound materials
Author 
Wasa, Kiyotaka. Kitabatake, Makoto. Adachi, Hideaki.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815514831
Format: 
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Online Library~1
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3. 
Cover image for Vacuum technology, thin films, and sputtering an introduction
Vacuum technology, thin films, and sputtering an introduction
Author 
Stuart, R. V.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780126747805
Format: 
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