Title:
Electron-beam technology in microelectronic fabrication
Author:
Brewer, George Raymond, 1922-
ISBN:
9780121335502
9780323153416
Publication Information:
New York : Academic Press, 1980.
Physical Description:
1 online resource (xi, 362 pages) : illustrations
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780121335502Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 254924-1001 | ONLINE | Searching... | Searching... |