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1. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
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ONLINE
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Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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2. 
Cover image for Fine line lithography
Fine line lithography
Author 
Newman, Roger.
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Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780444853516
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3. 
Cover image for Materials and Processes for Next Generation Lithography.
Materials and Processes for Next Generation Lithography.
Author 
Robinson, Alex, editor. Lawson, Richard, editor.
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ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11
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4. 
Cover image for Nanoimprint Lithography: An Enabling Process for Nanofabrication
Nanoimprint Lithography: An Enabling Process for Nanofabrication
Author 
Zhou, Weimin. author. SpringerLink (Online service)
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ONLINE(333849.1)
Electronic Access 
http://dx.doi.org/10.1007/978-3-642-34428-2
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5. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
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ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
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6. 
Cover image for Periodic materials and interference lithography for photonics, phononics and mechanics
Periodic materials and interference lithography for photonics, phononics and mechanics
Author 
Maldovan, Martin. Thomas, Edwin L.
Preferred Shelf Number 
ONLINE
Electronic Access 
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=481829
John Wiley http://dx.doi.org/10.1002/9783527625390
http://site.ebrary.com/lib/alltitles/Doc?id=10332950
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7. 
Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
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Electronic Access 
John Wiley http://dx.doi.org/10.1002/9780470723876
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8. 
Cover image for Microfluidics and microscale transport processes
Microfluidics and microscale transport processes
Author 
Chakraborty, Suman, 1973-
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ONLINE
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9. 
Cover image for Vistas in nanofabrication
Vistas in nanofabrication
Author 
Rahman, Faiz.
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10. 
Cover image for Graphene, carbon nanotubes, and nanostuctures techniques and applications
Graphene, carbon nanotubes, and nanostuctures techniques and applications
Author 
Morris, James E., 1944- Iniewski, Krzysztof, 1960-
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11. 
Cover image for Nanofabrication handbook
Nanofabrication handbook
Author 
Cabrini, Stefano. Kawata, Satoshi, 1966-
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12. 
Cover image for Plasma processing of nanomaterials
Plasma processing of nanomaterials
Author 
Sankaran, Mohan.
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