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Cover image for Digital holography for MEMS and microsystem metrology
Title:
Digital holography for MEMS and microsystem metrology
Author:
Asundi, Anand.
ISBN:
9781119997290

9781119997306
Publication Information:
Chichester : Wiley, c2011.
Physical Description:
1 online resource (xxii, 205 p.)
Series:
Microsystem and nanotechnology series
Series Title:
Microsystem and nanotechnology series
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