Title:
Computational lithography
Author:
Ma, Xu, 1983-
ISBN:
9780470618943
9780470618936
9780470596975
9781118043578
Publication Information:
Hoboken, N.J. : Wiley, c2010.
Physical Description:
1 online resource (xv, 226 p.) : ill.
Series:
Wiley series in pure and applied optics
Series Title:
Wiley series in pure and applied optics
Genre:
Added Author:
Added Corporate Author:
Electronic Access:
Available by subscription from Safari Books OnlineEbook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 298011-1001 | ONLINE | Searching... | Searching... |