Title:
Atomic Layer Deposition for Semiconductors
Author:
Hwang, Cheol Seong. editor.
ISBN:
9781461480549
Edition:
1st ed. 2014.
Physical Description:
X, 263 p. 170 illus., 81 illus. in color. online resource.
Contents:
Introduction -- Precursors and reaction mechanisms -- ALD simulations -- ALD for mass-production memories (DRAM and Flash) -- ALD for emerging memories -- PcRAM -- FeRAM -- Front end of the line process -- Back end of the line -- ALD machines.
Added Author:
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-1-4614-8054-9Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 530831-1001 | ONLINE | Searching... | Searching... |