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1. 
Cover image for Microlithography science and technology
Microlithography science and technology
Author 
Suzuki, Kazuaki. Smith, Bruce W., 1959-
Preferred Shelf Number 
ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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2. 
Cover image for Handbook of microlithography, micromachining, and microfabrication
Handbook of microlithography, micromachining, and microfabrication
Author 
Rai-Choudhury, P.
Preferred Shelf Number 
TK7836 H3423 1997 V.1
Format: 
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Beytepe Library~2
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3. 
Cover image for Polymers in microlithography : materials and processes
Polymers in microlithography : materials and processes
Author 
Reichmanis, Elsa, 1953-, ed. MacDonald, Scott A., ed. Iwayanagi, Takao, 1949-, ed. American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Preferred Shelf Number 
TK7871.15.P6 P635 1989
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4. 
Cover image for Handbook of VLSI microlithography principles, technology, and applications
Handbook of VLSI microlithography principles, technology, and applications
Author 
Helbert, John N.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815514442
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5. 
Cover image for Handbook of VLSI microlithography principles, technology, and applications
Handbook of VLSI microlithography principles, technology, and applications
Author 
Glendinning, William B. Helbert, John N.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815512813
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6. 
Cover image for Materials and Processes for Next Generation Lithography.
Materials and Processes for Next Generation Lithography.
Author 
Robinson, Alex, editor. Lawson, Richard, editor.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11
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7. 
Cover image for Photomask fabrication technology
Photomask fabrication technology
Author 
Eynon, Benjamin G. Wu, Banqiu.
Preferred Shelf Number 
ONLINE
Electronic Access 
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8. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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9. 
Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9780470723876
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10. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527613786
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11. 
Cover image for Ätzverfahren für die Mikrotechnik
Ätzverfahren für die Mikrotechnik
Author 
Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/3527602917
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12. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
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