Title:
Interlayer dielectrics for semiconductor technologies
Author:
Murarka, S. P.
ISBN:
9780125112215
9780080521954
Publication Information:
Amsterdam ; Boston : Elsevier/Academic Press, 2003.
Physical Description:
1 online resource (xiv, 444 p.) : ill.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780125112215Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 254286-1001 | ONLINE | Searching... | Searching... |