Cover image for High-K gate dielectrics
Title:
High-K gate dielectrics
Author:
Houssa, Michel.
ISBN:
9781420034141
Publication Information:
Bristol ; Philadelphia : Institute of Physics, c2004.
Physical Description:
xi, 601 p. : ill.
Series:
Series in materials science and engineering
Series Title:
Series in materials science and engineering
Subject Term:
Gate array circuits -- Materials.

Metal oxide semiconductors -- Materials.

Metal oxide semiconductors, Complementary -- Materials.

Dielectrics -- Research.

Dielectric devices.
Added Author:
Houssa, Michel.
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