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Cover image for Microlithography : science and technology
Microlithography : science and technology
Author 
Smith, Bruce W., 1959- editor. Suzuki, Kazuaki, editor.
Preferred Shelf Number 
TK7836
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9781315117171
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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2. 
Cover image for Photomask fabrication technology
Photomask fabrication technology
Author 
Eynon, Benjamin G. Wu, Banqiu.
Preferred Shelf Number 
ONLINE
Electronic Access 
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3. 
Cover image for Microlithography : science and technology
Microlithography : science and technology
Author 
Suzuki, Kazuaki. Smith, Bruce W., 1959-
Preferred Shelf Number 
TK7836 .M525 2007
Electronic Access 
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