Cover image for Nanoscale calibration standards and methods dimensional and related measurements in the micro- and nanometer range
Title:
Nanoscale calibration standards and methods dimensional and related measurements in the micro- and nanometer range
Author:
Wilkening, Günter.
ISBN:
9783527606665

9783527606870

9783527405022
Publication Information:
Weinheim ; [Chichester?] : Wiley-VCH , c2005.
Physical Description:
xxii, 519 p. : ill. ; 25 cm.
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