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1. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
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ONLINE
Electronic Access 
Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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2. 
Cover image for Fine line lithography
Fine line lithography
Author 
Newman, Roger.
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ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780444853516
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3. 
Cover image for Materials and Processes for Next Generation Lithography.
Materials and Processes for Next Generation Lithography.
Author 
Robinson, Alex, editor. Lawson, Richard, editor.
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Electronic Access 
ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11
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4. 
Cover image for Nanoimprint Lithography: An Enabling Process for Nanofabrication
Nanoimprint Lithography: An Enabling Process for Nanofabrication
Author 
Zhou, Weimin. author. SpringerLink (Online service)
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ONLINE(333849.1)
Electronic Access 
http://dx.doi.org/10.1007/978-3-642-34428-2
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5. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
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Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
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6. 
Cover image for Periodic materials and interference lithography for photonics, phononics and mechanics
Periodic materials and interference lithography for photonics, phononics and mechanics
Author 
Maldovan, Martin. Thomas, Edwin L.
Preferred Shelf Number 
ONLINE
Electronic Access 
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=481829
John Wiley http://dx.doi.org/10.1002/9783527625390
http://site.ebrary.com/lib/alltitles/Doc?id=10332950
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7. 
Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9780470723876
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8. 
Cover image for Towards AI-Aided Invention and Innovation 23rd International TRIZ Future Conference, TFC 2023, Offenburg, Germany, September 12-14, 2023, Proceedings
Towards AI-Aided Invention and Innovation 23rd International TRIZ Future Conference, TFC 2023, Offenburg, Germany, September 12-14, 2023, Proceedings
Author 
Cavallucci, Denis. editor. Livotov, Pavel. editor. Brad, Stelian. editor. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-031-42532-5
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9. 
Cover image for Nano- and Microfabrication Techniques in Drug Delivery Recent Developments and Future Prospects
Nano- and Microfabrication Techniques in Drug Delivery Recent Developments and Future Prospects
Author 
Lamprou, Dimitrios. editor. SpringerLink (Online service)
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Electronic Access 
https://doi.org/10.1007/978-3-031-26908-0
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10. 
Cover image for Springer Handbook of Semiconductor Devices
Springer Handbook of Semiconductor Devices
Author 
Rudan, Massimo. editor. Brunetti, Rossella. editor. Reggiani, Susanna. editor. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-030-79827-7
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11. 
Cover image for Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
Author 
Hilleringmann, Ulrich. author. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-658-41041-4
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12. 
Cover image for Micro and Nano Fabrication Tools and Processes
Micro and Nano Fabrication Tools and Processes
Author 
Gatzen, Hans H. author. Saile, Volker. author. Leuthold, Jürg. author. SpringerLink (Online service)
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https://doi.org/10.1007/978-3-662-44395-8
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