Title:
Fundamentals of semiconductor manufacturing and process control
Author:
May, Gary S.
ISBN:
9780471784067
9780471790273
9780471790280
9781615838455
Publication Information:
[Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, ©2006.
Physical Description:
1 online resource (xix, 463 pages) : illustrations
Genre:
Added Author:
Electronic Access:
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 249425-1001 | ONLINE | Searching... | Searching... |