Cover image for Silicon Wafer Bonding Technology for VLSI and MEMS Applications
Title:
Silicon Wafer Bonding Technology for VLSI and MEMS Applications
Author:
Iyer, S. S., ed.
ISBN:
9781849193702
Publication Information:
Stevenage : IET, 2002.
Physical Description:
1 online resource (175 p.)
Series:
Circuits, Devices and Systems
Series Title:
Circuits, Devices and Systems
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