Cover image for Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
Title:
Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
Author:
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)
ISBN:
9780444596918
Publication Information:
Amsterdam : North-Holland, 1993.
Physical Description:
1 online resource (xiv, 338 p.) : ill.
Series:
European Materials Research Society symposia proceedings ; v. 34
Series Title:
European Materials Research Society symposia proceedings ; v. 34
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