Cover image for Nano-CMOS gate dielectric engineering
Title:
Nano-CMOS gate dielectric engineering
Author:
Wong, Hei.
ISBN:
9781439849606
Publication Information:
Boca Raton : CRC Press, 2012.
Physical Description:
xiv, 234 p. : ill.
Contents:
1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
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