Title:
Microelectronic applications of chemical mechanical planarization
Author:
Li, Yuzhuo.
ISBN:
9780470180907
Publication Information:
Hoboken, N.J. : Wiley-Interscience, c2008.
Physical Description:
xxv, 734 p. : ill. ; 25 cm.
Added Author:
Added Corporate Author:
Electronic Access:
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.htmlJohn Wiley http://dx.doi.org/10.1002/9780470180907
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|---|---|---|---|---|---|
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